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FRONT MATTER
| i |
ATOM, MOLECULE, AND NANOCLUSTER MANIPULATIONS FOR NANOSTRUCTURE FABRICATION USING SCANNING PROBE MICROSCOPY
AMPERE A. TSENG, S. D. SARTALE, M. F. LUO and C. C. KUO | 1 |
ATOMIC FORCE MICROSCOPE LITHOGRAPHY
NORITAKA KAWASEGI, DEUG WOO LEE, NOBORU MORITA and JEONG WOO PARK | 33 |
SCANNING PROBE ARRAYS FOR NANOSCALE IMAGING, SENSING, AND MODIFICATION
CHRISTIAN SANTSCHI, JERÔME POLESEL-MARIS, JÜRGEN BRUGGER and HARRY HEINZELMANN | 65 |
USING BIOMOLECULES FOR SELF-ASSEMBLY OF ENGINEERED NANO-SCALE STRUCTURES AND DEVICES
RANJANA MEHTA, JOHN LUND and BABAK A. PARVIZ | 127 |
NANOFABRICATION BASED ON SELF-ASSEMBLED ALUMINA TEMPLATES
S. SEN and N. A. KOUKLIN | 159 |
NANOWIRE ASSEMBLY AND INTEGRATION
ZHIYONG GU and DAVID H. GRACIAS | 187 |
TAPER-DRAWING FABRICATION OF GLASS NANOWIRES
LIMIN TONG and ERIC MAZUR | 213 |
EXTREME ULTRAVIOLET LITHOGRAPHY
HIROO KINOSHITA | 235 |
ELECTRON PROJECTION LITHOGRAPHY
TAKAHARU MIURA, KAZUAKI SUZUKI, HIROSHI ARIMOTO and SHINTARO KAWATA | 285 |
ELECTRON BEAM DIRECT WRITING
KENJI YAMAZAKI | 341 |
ELECTRON BEAM INDUCED DEPOSITION
KAZUTAKA MITSUISHI | 377 |
HIGH-RESOLUTION ELECTRON-BEAM-INDUCED DEPOSITION
P. A. CROZIER and C. W. HAGEN | 399 |
FOCUSED ION BEAMS AND INTERACTION WITH SOLIDS
TOHRU ISHITANI, TSUYOSHI OHNISHI and TOSHIE YAGUCHI | 431 |
NANO/MICROSTRUCTURING OF CERAMIC SURFACES BY UNCONVENTIONAL LITHOGRAPHIC METHODS
ROBERTO C. SALVAREZZA and OMAR AZZARONI | 471 |
ALTERNATIVE NANOFABRICATION APPROACHES FOR NON-CMOS APPLICATIONS
C. V. COJOCARU, F. CICOIRA and F. ROSEI | 499 |
NANOFABRICATION OF NANOELECTROMECHANICAL SYSTEMS (NEMS): EMERGING TECHNIQUES
K. L. EKINCI and J. BRUGGER | 543 |
BACK MATTER
| 567 |
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