SMART MEMS AND SENSOR SYSTEMS

SMART MEMS AND SENSOR SYSTEMS

CONTENTS


FRONT MATTER	i
MARKETS AND APPLICATIONS Elena Gaura and Robert Newman	1
MICROFABRICATION TECHNOLOGIES Andrew Flewitt	31
SENSOR ELECTRONICS Elena Gaura and Robert Newman	107
SENSOR SIGNAL ENHANCEMENT Elena Gaura	173
CASE STUDY: CONTROL SYSTEMS FOR CAPACITIVE INERTIAL SENSORS Michael Kraft	233
CASE STUDY: ADAPTIVE OPTICS AND SMART VLSI/MEMS SYSTEMS Davies William de Lima Monteiro	273
ARTIFICIAL INTELLIGENCE TECHNIQUES FOR MICROSENSORS IDENTIFICATION AND COMPENSATION Elena Gaura and Robert Newman	305
SMART, INTELLIGENT AND COGENT MEMS BASED SENSORS Elena Gaura and Robert Newman	369
SENSOR ARRAYS AND NETWORKS Robert Newman and Elena Gaura	417
WIRELESS AND AD HOC SENSOR NETWORKS Robert Newman	465
REALISING THE DREAM — A CASE STUDY Elena Gaura and Robert Newman	509
BACK MATTER	533
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