SILICON CARBIDE MICROELECTROMECHANICAL SYSTEMS FOR HARSH ENVIRONMENTS

SILICON CARBIDE MICROELECTROMECHANICAL SYSTEMS FOR HARSH ENVIRONMENTS

CONTENTS


FRONT MATTER	i
INTRODUCTION TO SILICON CARBIDE (SIC) MICROELECTROMECHANICAL SYSTEMS (MEMS) Rebecca Cheung	1
DEPOSITION TECHNIQUES FOR SIC MEMS Christian A. Zorman, Xiao-An Fu and Mehran Mehregany	18
REVIEW OF ISSUES PERTAINING TO THE DEVELOPMENT OF CONTACTS TO SILICON CARBIDE: 1996–2002 Lisa M. Porter and Feroz A. Mohammad	46
DRY ETCHING OF SIC S. J. Pearton	102
DESIGN, PERFORMANCE AND APPLICATIONS OF SIC MEMS Stefan Zappe	128
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