Home  |  Search  |  For Researchers  |  For Librarians  |  Customer Service  |
ADVANCES IN MULTIPHYSICS SIMULATION AND EXPERIMENTAL TESTING OF MEMS


CONTENTS

FRONT MATTER
i
Challenges in Modeling Liquid and Gas Flows in Micro/Nano Devices
Mohamed Gad-el-Hak
1
Using the Kinetic Equations for MEMS and NEMS
Carlo Cercignani, Aldo Frezzotti and Silvia Lorenzani
37
Applying the Direct Simulation Monte Carlo (DSMC) Method to Gas-Filled MEMS Devices
M. A. Gallis
81
New Approaches for the Simulation of Micro-Fluidics in MEMS
T. Y. Ng, Hua Li, K. Y. Lam, L. S. Pan and D. Xu
121
Evaluating Gas Damping in MEMS Using Fast Integral Equation Solvers
Attilio Frangi, Wenjing Ye and Jacob White
153
Experimental Techniques for Damping Characterization of Micro and Nanostructures
Alain Bosseboeuf and Hervé Mathias
183
Nonlinear Dynamics of Electrostatically Actuated MEMS
S. K. De and N. R. Aluru
235
Coupled Deformation Analysis of Thin MEMS Plates
S. Mukherjee and S. Telukunta
287
Pull-In Instability in Electrostatically Actuated MEMS due to Coulomb and Casimir Forces
Romesh C. Batra, Davide Spinello and Maurizio Porfiri
329
Numerical Simulation of BioMEMS with Dielectrophoresis
G. R. Liu and C. X. Song
375
Continuous Modeling of Multi-Physics Problems of Microsystems for Topology Optimization
G. K. Ananthasuresh
399
Mechanical Characterization of Polysilicon at the Micro-Scale Through On-Chip Tests
Alberto Corigliano, Fabrizio Cacchione, Attilio Frangi, Sarah Zerbini and Marco Ferrera
427
Nano-Scale Testing of Nanowires and Carbon Nanotubes Using a Micro-Electro-Mechanical System
Horacio D. Espinosa, Yong Zhu, Bei Peng and Owen Loh
455
BACK MATTER
491
Back

Copyright © 2012 World Scientific Publishing Co. All rights reserved.