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FRONT MATTER
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Challenges in Modeling Liquid and Gas Flows in Micro/Nano Devices
Mohamed Gad-el-Hak | 1 |
Using the Kinetic Equations for MEMS and NEMS
Carlo Cercignani, Aldo Frezzotti and Silvia Lorenzani | 37 |
Applying the Direct Simulation Monte Carlo (DSMC) Method to Gas-Filled MEMS Devices
M. A. Gallis | 81 |
New Approaches for the Simulation of Micro-Fluidics in MEMS
T. Y. Ng, Hua Li, K. Y. Lam, L. S. Pan and D. Xu | 121 |
Evaluating Gas Damping in MEMS Using Fast Integral Equation Solvers
Attilio Frangi, Wenjing Ye and Jacob White | 153 |
Experimental Techniques for Damping Characterization of Micro and Nanostructures
Alain Bosseboeuf and Hervé Mathias | 183 |
Nonlinear Dynamics of Electrostatically Actuated MEMS
S. K. De and N. R. Aluru | 235 |
Coupled Deformation Analysis of Thin MEMS Plates
S. Mukherjee and S. Telukunta | 287 |
Pull-In Instability in Electrostatically Actuated MEMS due to Coulomb and Casimir Forces
Romesh C. Batra, Davide Spinello and Maurizio Porfiri | 329 |
Numerical Simulation of BioMEMS with Dielectrophoresis
G. R. Liu and C. X. Song | 375 |
Continuous Modeling of Multi-Physics Problems of Microsystems for Topology Optimization
G. K. Ananthasuresh | 399 |
Mechanical Characterization of Polysilicon at the Micro-Scale Through On-Chip Tests
Alberto Corigliano, Fabrizio Cacchione, Attilio Frangi, Sarah Zerbini and Marco Ferrera | 427 |
Nano-Scale Testing of Nanowires and Carbon Nanotubes Using a Micro-Electro-Mechanical System
Horacio D. Espinosa, Yong Zhu, Bei Peng and Owen Loh | 455 |
BACK MATTER
| 491 |
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